Linear Composition Gradient of Two Materials

Both the PLD/MBE 2300 has a multi-target carousels that allow the sequential deposition from different target materials without breaking vacuum. The PLD/MBE also has a linear window-opening shutter that can be synchronized with the laser pulses. For most films, each nanometer of film requires 40 laser-pulses. If a film with a linear gradient of materials A and B is required: The linear shutter would be positioned such that the shutter would completely cover the substrate but one edge of the opening was at the edge of the substrate. As the first of 40 pulses of material A started to deposit, the shutter would start to move across the substrate positioning more of the window over the substrate and ending with the substrate fully exposed just as the 40 pulses of material A ended. This would create a thickness gradient of material A across the substrate. The target carousel would move to material B, the linear shutter would be positioned such that the shutter would completely cover the substrate but opposite edge of the opening was at the edge of the substrate. As the first of 40 pulses of material B started to deposit, the shutter would start to move across the substrate in the opposite direction positioning more of the window over the substrate and ending with the substrate fully exposed just as the 40 pulses of material B ended. This would create a thickness gradient of material B across the substrate but in the opposite direction. The process of depositing materials A and B would be continued until a film of the desired thickness was obtained. Because each layer is so thin, there is complete mixing of materials A, B and C without the need for diffusion. The software is equipped with a “recipe” option that allows the entire film to be programmed and deposited without operator intervention during the deposition.