Multilayer and Superlattice Deposition

Both the PLD/MBE 2300 and nanoPLD1000 have multi-target carousels that allow the sequential deposition from different target materials without breaking vacuum. The software is equipped with a “recipe” option that allows the entire film stack to be programmed and deposited without operator intervention during the deposition. An example of such a deposition is the Ni / NiO multilayer pictured here.