The PLD/MBE also has a linear shutter that can be stepped across the substrate and synchronized with the laser pulses. The shutter is stepped to the first location exposing a small strip of the substrate and the desired number of pulses deposited. The shutter is then move to a second position and the desired number of pulses deposited on both the initial film strip and also onto a heretofore undeposited substrate region. The process is continued across the entire substrate to create a sequence of successively thinner film layers. Alternately, the mask can be started such that the entire substrate is deposited upon at first, and the mask stepped to cover successive strips of the substrate to create a sequence of successively thicker film layers.