Combinatorial Film Deposition with up to four targets

By careful positioning of where the laser pulse ablates the target relative to the substrate and not rotating the substrate, it is possible to deposit a thickness gradient across the substrate. Both the PLD/MBE 2300 and nanoPLD1000 have multi-target carousels that allow the sequential deposition from different target materials without breaking vacuum. For most films, each nanometer of film requires 40 laser-pulses. If a combinatorial film of materials A, B and C is required: First, 40 pulses of material A would be deposited without substrate rotation; Second, the substrate would be rotated 120° and 40 pulses of material B would be deposited, again, without substrate rotation; Third, the substrate would be rotated an additional 120° in the same direction and 40 pulses of material C would be deposited, again, without substrate rotation. The system would then be returned to the original substrate rotation. The process of depositing materials A, B and C would be continued until a film of the desired thickness was obtained. Because each layer is so thin, there is complete mixing of materials A, B and C without the need for diffusion. The software is equipped with a “recipe” option that allows the entire film to be programmed and deposited without operator intervention during the deposition. See more here