Deep Reactive Ion Etcher – STS LpX Pegasus

The Deep Reactive Ion Etcher (DRIE) uses a patented process to etch 3D features into silicon wafers. This allows users to create micro and nano-scale silicon-based devices ranging from probe tips to sensors to optical coatings.  Unlike other etching processes, the DRIE is capable of creating very high aspect ratio structures without impacting the surrounding Read More…