The Houck Lab at Princeton has recently fabricated and characterized the first microwave resonator arrays.

The selected array geometry consists of 12 coplanar waveguide resonators, coupled by three-way capacitors to form a Kagome star. The successful reduction of disorder in resonator frequencies to as little as a few parts in 10⁴ paves the way for large circuit QED lattices and the study of interacting polaritons — quasiparticles that combine photon degrees of freedom and quantum excitations of nonlinear superconducting circuits.

Link: Preprint by Underwood et al.