Nanosphere Lithography (NSL)

For our Q&A section have a look here and for NSL Geometry calculations look here.

Materials Generality, Single Layer Mask, and Double Layer Mask
Nanosphere lithography is a materials and substrate general nanofabrication technique capable of synthesizing size tunable nanoparticle arrays. Two self-assembled nanosphere mask geometries have been demonstrated. The single layer mask yields nanoparticles with an in-plane triangular shape that arrange on the substrate surface with P2 symmetry. The double layer mask yields nanoparticles with an elliptical in-plane shape that arrange on the substrate surface with hexagonal symmetry.

Size Tunable Nanoparticle Arrays
Using the single layer and double layer masks, size tunable silver nanoparticle and surface cluster arrays have been fabricated using nanosphere lithography by systematically changing the diameter, D, of the nanospheres forming the mask and the mass thickness, dm, of the silver overlayer. The in-plane diameter, “a”, was tuned from 21-126 nm and the out-of-plane height was tuned from 4-47 nm.

“Stability of Silver Nanoparticles Fabricated by Nanosphere Lithography and Atomic Layer Deposition to Femtosecond Laser Excitation,” J. Sung, K. Kosuda, J. W. Elam, K. G. Spears, and R. P. Van Duyne, J. Phys. Chem. C, 112, 5707-5714 (2008).

“Plasmonic Properties of Copper Nanoparticles Fabricated by Nanosphere Lithography,” G. H. Chan, J. Zhao, Erin M. Hicks, George C. Schatz, and R. P. Van Duyne, Nano Letters, 7, 1947-1952 (2007).

“Solution-Phase, Triangular Ag Nanotriangles Fabricated by Nanosphere Lithography,” A. J. Haes, J. Zhao, S. Zou,, C. S. Own, L. D. Marks, G. C. Schatz, and R. P. Van Duyne, J. Phys. Chem. B., 109, 11158-11162 (2005).

“Dichroic Optical Properties of Extended Nanostructures Fabricated Using Angle-Resolved Nanosphere Lithography“, C. L. Haynes, R. P. Van Duyne, Nano Lett., 3, 939-943 (2003).

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  • Professor Richard Van Duyne

    Additional Information

    Discoverer of Surface-enhanced Raman Spectroscopy (1977)
    Inventor of Nanosphere Lithography (1995) & Localized Surface Plasmon Resonance Spectroscopy (2000)

  • Group Members

    Professor Van Duyne has, in his career to date, advised a total of 87 graduate students and 47 postdoctoral fellows. Every year, Professor Van Duyne gives a talk to introduce new graduate students to our research. The 2017 seminar slides are available here.

  • News

    Professor Van Duyne was recently named a Vannevar Bush Faculty Fellow by the U.S. Department of Defense to conduct "high risk, high payoff" basic scientific research. Read more here